A Local Optimal Method on DSA Guiding Template Assignment with Redundant/Dummy Via Insertion
Refereed conference paper presented and published in conference proceedings


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AbstractAs an emerging manufacture technology, block copolymer directed self-assembly (DSA) is promising for via layer fabrication. Meanwhile, redundant via insertion is considered as an essential step for yield improvement. For better reliability and manufacturability, in this paper, we concurrently consider DSA guiding template assignment with redundant via and dummy via insertion at post-routing stage. Firstly, by analyzing the structure property of guiding templates, we propose a building-block based solution expression to discard redundant solutions. Then, honoring the compact solution expression, we construct a conflict graph with dummy via insertion, and then formulate the problem to an integer linear programming (ILP). To make a good trade-off between solution quality and runtime, we relax the ILP to an unconstrained nonlinear programming (UNP). Finally, a line search optimization algorithm is proposed to solve the UNP. Experimental results verify the effectiveness of our new solution expression and the efficiency of our proposed algorithm.
All Author(s) ListXingquan Li, Bei Yu, Jianli Chen, Wenxing Zhu
Name of Conference24th Asia and South Pacific Design Automation Conference, ASPDAC 2019
Start Date of Conference21/01/2019
End Date of Conference24/01/2019
Place of ConferenceTokyo
Country/Region of ConferenceJapan
Proceedings TitleProceedings of the Asia and South Pacific Design Automation Conference
Year2019
Month1
Pages305 - 310
ISBN978-145036007-4
LanguagesEnglish-United States

Last updated on 2020-01-04 at 02:32