AlN Thin Films Prepared by Reactive Ion Beam Coating
Refereed conference paper presented and published in conference proceedings


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All Author(s) ListCheng, L.L., Y.H. Yu, B. Sundararcl, E.Z. Luo, S. Lin, Y.M. Lei, C.X. Ren, W.Y. Cheung, S.P. Wong, J.B. Xun, I.H. Wilson
Name of ConferenceAbstracts of the Material Research Society 1999 Fall Meeting, Paper L5.8
Country/Region of ConferenceUnited States of America
Proceedings TitleAbstracts of the Material Research Society 1999 Fall Meeting, Paper L5.8
Year1999
Place of PublicationUnited States of America, Boston, USA
Pages208
LanguagesEnglish-United Kingdom
KeywordsALN THIN FILM ; REACTION ION BEAM COATING

Last updated on 2018-18-01 at 02:25