Characteristics of Carbon Nitride Films Prepared by Magnetic Filtered Plasma Stream
Refereed conference paper presented and published in conference proceedings
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著者Wei, Aixiang, Shaoqi Peng, Dihu Chen, Ning Ke, S.P. Wong
會議名稱Abstracts of the Materials Research Society 1997 Fall Meeting
會議國家/地區美國
會議論文集題名Abstracts of the Materials Research Society 1997 Fall Meeting
出版年份1997
月份12
期次Paper AA5.10
出版地United States of America, USA
頁次550
語言英式英語
關鍵詞CARBON NITRIDE ; FTIR ; XPS
