Infrared Photoelasticity Study of Stress Distribution in Silicon Under Patterned Structures
Refereed conference paper presented and published in conference proceedings
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著者Wong, S.P., W.Y. Cheung, N. Ke, M.R. Sajan, W.S. Guo, L. Huang, Shounan Zhao
會議名稱Proceedings of 1996 International Electron Devices and Materials Symposia, Symposium C, E, F
會議國家/地區台灣
會議論文集題名Proceedings of 1996 International Electron Devices and Materials Symposia, Symposium C, E, F
出版年份1996
月份12
出版地Taiwan, Hsinchu, Taiwan
頁次65
語言英式英語
關鍵詞PHOTOELASTICITY ; STRESS DISTRIBUTION
