AFM Study of Surface Morphology of High Dose Co Implanted Si with a MEVVA Ion Source
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All Author(s) ListPENG Qi Cai, WONG Sai Peng Joseph, XU Jianbin, WILSON Ian Howard
Name of ConferenceAbstracts of the Materials Research Society, 1995 Fall Meeting. Paper A11.18
Start Date of Conference27/11/1995
Country/Region of ConferenceUnited States of America
Proceedings TitleAbstracts of the Materials Research Society, 1995 Fall Meeting. Paper A11.18
Year1995
Month11
Day27
PublisherMaterials Research Society
Place of PublicationUnited States of America, Boston, USA
Pages80
LanguagesEnglish-United Kingdom
KeywordsAFM ; CO IMPLANTATION ; MEVVA IMPLANTATION

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