XPS Study of SiC Thin Layer Formed by Ion Implantation with a Metal Vapor Vacuum arc Ion Source
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All Author(s) ListYAN Hui, KWOK Wai Man Raymund, WONG Sai Peng Joseph
Name of ConferenceSummaries of the 7th International Conference on Solid Films and Surfaces
Country/Region of ConferenceTaiwan
Proceedings TitleSummaries of the 7th International Conference on Solid Films and Surfaces
Year1994
Month12
PublisherNational Tsing Hua University
Place of PublicationTaiwan, Hsinchu, Taiwan
Pages395
LanguagesEnglish-United Kingdom
KeywordsMEVVA IMPLANTATION ; SiC ; XPS

Last updated on 2018-17-01 at 15:42