Characterization of GeSi Layer Formed by High Dose Ge Implantation into Si
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All Author(s) ListCHEUNG Wing Yiu, WONG Sai Peng Joseph, WILSON Ian Howard, T.H. Zhang
Name of ConferenceAbstracts of 1993 Fall Meeting of the Materials Research Society
Country/Region of ConferenceUnited States of America
Proceedings TitleAbstracts of 1993 Fall Meeting of the Materials Research Society
Year1993
Month11
Place of PublicationUnited States of America, Boston, USA
Pages34
LanguagesEnglish-United Kingdom
KeywordsGESI ALLOY ; HIGH DOSE GE IMPLANTATION ; RBS

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