Modeling of Damage Enhanced Diffusion of Implanted Borons in Silicon
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All Author(s) ListLo, V.C., WONG Sai Peng Joseph, LAM Yat Wah
Name of ConferenceAbstracts of 1990 Fall Meeting of the Materials Research Society
Country/Region of ConferenceUnited States of America
Proceedings TitleAbstracts of 1990 Fall Meeting of the Materials Research Society
Year1990
Month11
Place of PublicationUnited States of America, Boston, USA
Pages17
LanguagesEnglish-United Kingdom
KeywordsBORON DIFFUSION ; DAMAGE ENHANCED DIFFUSION

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