Thermal Diffusion in Au-WTi-pd Metallization on Silicon
Publication in refereed journal
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All Author(s) ListWILSON Ian Howard, M. Milosavljevic, N. Bibic, M. Stojanovic, J. Turkovic
Journal nameVacuum
Year1990
Issue Number41
Place of PublicationUnited Kingdom, UK
Pages831
ISSN0042-207X
LanguagesEnglish-United Kingdom
KeywordsDIFFUSION ; METALLIZATION ; SILICON DEVICES
