MEMS yield simulation with monte carlo method
Refereed conference paper presented and published in conference proceedings


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AbstractIn this paper, Monte Carlo method is used for the simulation of point-stiction defects in MEMS accelerometer devices. The yield of MEMS devices is estimated based on the simulation results. Comparison between simulated yields of BISR/non- BISR MEMS accelerometers demonstrates effective yield increase due to self-repairable design. The simulation results of yield increase versus different initial yields for BISR MEMS accelerometers are in good agreement with theoretical prediction based on previous MEMS yield model. This verifies the correctness of the MEMS yield model. © 2007 Springer.
All Author(s) ListXiong X., Wu Y.-L., Jone W.-B.
Name of Conference2006 Int. Conf. on Telecommunications and Networking, TeNe 2006, and the 2006 Int. Conf. on Industrial Electronics, Technology and Automation, IETA 2006, Part of the CISSE 2006
Start Date of Conference04/12/2006
End Date of Conference14/12/2006
Detailed descriptionTarek Sobh, Khaled Elleithy, Ausif Mahmood
Year2007
Month12
Day1
Pages501 - 504
ISBN9781402062650
LanguagesEnglish-United Kingdom
KeywordsBISR (built-in self-repair), Defect simulation, Mems (microelectromechanical system), Monte carlo method, Yield

Last updated on 2020-22-09 at 03:42