Structural inhomogeneity of SrBi2Ta2O9 thin films prepared by layer-by-layer technique
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AbstractGrazing incidence x-ray diffraction has been employed to perform the depth-profile analysis on SrBi2Ta2O9 (SBT) thin films with different preferential orientations. For the polycrystalline SBT thin film, the change in structural orientation occurs only within the 15-nm-thick top layer, which is associated with the formation of the (200)-predominant SBT thin film prepared by the layer-by-layer annealing process. The inhomogeneity of structural orientation is more significant in the full film thickness for the (200)-predominant SBT thin film. (0010) peak can only be observed for the grazing angle larger than 0.6°. A layer with the highest ratio of I(200)/(115) is found in the top surface layer (i.e., the latest layer during deposition) of the (200)-predominant SBT thin film.
All Author(s) ListXu J.B., Hu G.D., Wong S.P.
Name of Conference2001 Materials Research Society Fall Meeting
Start Date of Conference25/11/2001
End Date of Conference29/11/2001
Place of ConferenceBoston, MA
Country/Region of ConferenceUnited States of America
Proceedings TitleFerroelectric Thin Films X
Detailed descriptionorganized by Materials Research Society,
Volume Number688
Pages85 - 88
LanguagesEnglish-United Kingdom

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