Al incorporation, structural and optical properties of AlxGa1-xN (0.13≤x≤0.8) alloys grown by MOCVD
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摘要The alloy AlxGa1-xN was grown by metal-organic chemical vapor deposition (MOCVD) using a high-temperature AlN interlayer on a thick GaN template. The Al composition (x) of the AlxGa1-xN was varied in the range 0.13≤x≤0.8. The in-situ reflectance spectra indicate that the growth process of AlGaN alloys is dominated by trimethylgallium (TMGa) molar flux when the molar flux of trimethylaluminium (TMAl) is kept constant. The Al compositions and growth rates of AlGaN alloys were determined by Rutherford backscattering, which indicates that the incorporation efficiency of TMAl is improved remarkably by decreasing the TMGa molar flux. The crystalline quality of these AlGaN alloys is evaluated by measuring the symmetric (0 0 2) and asymmetric (1 0 2) ω-scan X-ray diffraction peak widths. The best crystalline quality, among these AlxGa1-xN alloys, is for an Al composition of x=0.54 where the full-width at half-maximums of the AlGaN (0 0 2) and (1 0 2) diffraction peaks are 265 and 797 arcsec, respectively. This conclusion is consistent with the surface morphology of the AlGaN alloys probed by atomic force microscopy. Room temperature cathodoluminescence spectra show pronounced near band edge emission from these AlGaN alloys. The optical band gaps (Eg) are found to deviate from linear interpolation between EgGaN and EgAlN with a bowing parameter b=0.89. © 2008 Elsevier B.V. All rights reserved.
著者Liu B., Zhang R., Xie Z.L., Liu Q.J., Zhang Z., Li Y., Xiu X.Q., Yao J., Mei Q., Zhao H., Han P., Lu H., Chen P., Gu S.L., Shi Y., Zheng Y.D., Cheung W.Y., Ke N., Xu J.B.
期刊名稱Journal of Crystal Growth
出版年份2008
月份10
日期15
卷號310
期次21
出版社Elsevier BV
出版地Netherlands
頁次4499 - 4502
國際標準期刊號0022-0248
電子國際標準期刊號1873-5002
語言英式英語
關鍵詞A3. Metal-organic vapor phase epitaxy, B1. Alloys, B1. Nitrides, B2. Semiconducting III-V materials

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