Flexure-based Roll-to-roll Platform: A practical solution for realizing large-area microcontact printing
Publication in refereed journal


摘要A continuous roll-to-roll microcontact printing (MCP) platform promises large-area nanoscale patterning with significantly improved throughput and a great variety of applications, e.g. precision patterning of metals, bio-molecules, colloidal nanocrystals, etc. Compared with nanoimprint lithography, MCP does not require a thermal imprinting step (which limits the speed and material choices), but instead, extreme precision with multi-axis positioning and misalignment correction capabilities for large area adaptation. In this work, we exploit a flexure-based mechanism that enables continuous MCP with 500nm precision and 0.05N force control. The fully automated roll-to-roll platform is coupled with a new backfilling MCP chemistry optimized for high-speed patterning of gold and silver. Gratings of 300, 400, 600nm line-width at various locations on a 4-inch plastic substrate are fabricated at a speed of 60cm/min. Our work represents the first example of roll-to-roll MCP with high reproducibility, wafer scale production capability at nanometer resolution. The precision roll-to-roll platform can be readily applied to other material systems.
著者Zhou X., Xu H., Cheng J., Zhao N., Chen S.-C.
期刊名稱Scientific Reports
出版社Nature Publishing Group
出版地United Kingdom

上次更新時間 2020-30-11 於 01:41