Metal micro-additive manufacturing based on parallel femtosecond laser machining and electrodeposition
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AbstractIn this work, we present a parallel laser machining method using femtosecond lasers for additively printing high precision metal devices via electrodeposition. To achieve parallel micromachining, a femtosecond laser is first projected to a DMD, which spatially disperses the spectrum into different directions. After a collimating lens, an objective lens recombines all the dispersed spectrum to the focal region, forming a high-intensity thin light sheet for micromachining. The patterns on the light sheet can be arbitrarily controlled by the DMD. Preliminarily, we processed a 1 micron thick electrodeposited nickel layer on a substrate with 40 pulses of 50mW over 100×60 µm2. Complex 3-D metal structures can be fabricated by repeating the micromachining and electrodeposition processes.
Acceptance Date27/09/2016
All Author(s) ListDien Wang, Chenyang Wen, Yina Chang, Shih-Chi Chen
Name of ConferenceSPIE Photonics West 2017
Start Date of Conference28/01/2017
End Date of Conference02/02/2017
Place of ConferenceSan Francisco, USA
Country/Region of ConferenceUnited States of America
Year2017
LanguagesEnglish-United States

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