Ion impacts and nanostructures on Ge(111), In0.22Ga0.78As/GaAs(100) and alpha quartz surfaces observed by atomic force microscopy
Refereed conference paper presented and published in conference proceedings

香港中文大學研究人員

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摘要Atomic force microscopy (AFM) is used to compare the topography of the ion-bombarded surfaces of Ge(111), atomically flat terraces on strained layers of In0.22Ga0.78As on GaAs and alpha quartz.Germanium samples were bombarded with 100 keV Ge+ ions at doses of up to 10(16) ions cm(-2). A cellular structure with a mean pore diameter of 50 nm was observed at greater detail but similar to that reported in earlier scanning electron microscope (SEM) measurements [I. H. Wilson, J. Appl. Phys. 53, 1698-1705 (1982)]. It is proposed that this structure is formed by the intersection of the etched surface with point defect clusters created in the dense collision cascade, and the combined effects of sputter etching, ion reflection and redeposition.Individual impact craters are observed on As+- and B+-bombarded In0.22Ga0.78As/GaAs (35 keV, 10(11) ions cm(-2)) at the areal density identical to that of ion impacts. The craters arising from As+ bombardment are attributed to damage associated with nuclear stopping in the primary collision cascade.By contrast, alpha quartz samples bombarded with a wide range of ions (Pb, Ni, O, Si, Ar and In at doses of 10(10)-10(11) ions cm(-2)) and energies (30 keV to 0.73 GeV) exhibit asperities (bumps). In the case of very high energy ions, the areal density of asperities is much less than that of ion impacts. The asperities are attributed to volume expansion associated with amorphous zone creation. In the case of very high energy ions, zone creation is attributed to energetic knock-on cascades directed back towards the surface.
著者Wilson IH, Chen YJ, Xu JB, Devine RAB, Jeynes C
會議名稱The 9th Conference on Quantitative Surface Analysis
會議開始日15.07.1996
會議完結日19.07.1996
會議地點GUILDFORD
會議國家/地區英國
期刊名稱Surface and Interface Analysis
會議論文集題名SURFACE AND INTERFACE ANALYSIS
出版年份1996
月份12
卷號24
期次13
出版社JOHN WILEY & SONS LTD
頁次881 - 886
國際標準期刊號0142-2421
語言英式英語
Web of Science 學科類別Chemistry, Physical;Chemistry;CHEMISTRY, PHYSICAL

上次更新時間 2021-13-05 於 02:56