Soft mold-based hot embossing process for precision imprinting of optical components on non-planar surfaces
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AbstractPatterning micro- and nano-scale optical elements on nonplanar substrates has been technically challenging and prohibitively expensive via conventional processes. A low-cost, high-precision fabrication process is thus highly desired and can have significant impact on manufacturing that leads to wider applications. In this paper, we present a new hot embossing process that enables high-resolution patterning of micro- and nanostructures on non-planar substrates. In this process, a flexible elastomer stamp, i.e., PDMS, was used as a mold to perform hot-embossing on substrates of arbitrary curvatures. The new process was optimized through the development of an automated vacuum thermal imprinting system that allows non-clean room operation as well as precise control of all process parameters, e.g., pressure, temperature and time. Surface profiles and optical properties of the fabricated components, including micro-lens array and optical gratings, were characterized quantitatively, e.g., RMS similar to lambda/30 for a micro-lens, and proved to be comparable with high cost conventional precision processes such as laser lithographic fabrication. (C) 2015 Optical Society of America
All Author(s) ListChen JW, Gu CL, Lin H, Chen SC
Journal nameOptics Express
Year2015
Month8
Day10
Volume Number23
Issue Number16
PublisherOPTICAL SOC AMER
Pages20977 - 20985
ISSN1094-4087
LanguagesEnglish-United Kingdom
Web of Science Subject CategoriesOptics

Last updated on 2020-20-11 at 02:00