A 2-D PVDF force sensing system for micro-manipulation and micro-assembly
Refereed conference paper presented and published in conference proceedings

香港中文大學研究人員
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摘要Despite the enormous research efforts in creating new applications with MEMS, the research efforts at the backend such. as packaging and assembly are relatively limited. One reason for this is the level of difficulty involved. One fundamental challenge lies in the fact that at micro-scale, micro mechanical structures are fragile and easy to break they typically will break at the micro-Newton (muN or 10(-6)N) force range, which is a range that cannot be felt by human operators. In this paper, we will present our ongoing development of a polyvinylidence fluoride (PVDF) multi-direction micro-force sensing system that can be potentially used for force-reflective manipulation of micro-mechanical devices or micro-organisms over remote distances. Thus far, we have successfully demonstrated 1D and 2D sensing systems that are able to sense force information when a micro-manipulation probe-tip is used to lift a micro mass supported by 2mumx30mumx200mum polysilicon beams. Hence, we have shown that force detection in the 50muN range is possible with PVDF sensors integrated with commercial micro-manipulation probe-tips. We believe this project win eventually make a great impact to the globalization of MEMS foundries because it will allow global users to micro-assemble and micro-manipulate surface micromachined devices from their laboratories, and therefore, reduce the time from design to production significantly.
著者Fung CKM, Elhajj I, Li WJ, Xi N
會議名稱19th IEEE International Conference on Robotics and Automation (ICRA)
會議開始日11.05.2002
會議完結日15.05.2002
會議地點WASHINGTON
會議國家/地區美國
出版年份2002
月份1
日期1
出版社IEEE
頁次1489 - 1494
國際標準書號0-7803-7272-7
語言英式英語
Web of Science 學科類別Automation & Control Systems; Computer Science; Computer Science, Artificial Intelligence; Engineering; Engineering, Electrical & Electronic; Engineering, Mechanical; Robotics

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