3-D micro channel system in a quartz cube for biomedical applications
Refereed conference paper presented and published in conference proceedings

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AbstractA novel technology is presented to create three dimensional (3-D) micro channel systems bounded by a solid 3-D quartz substrate by means of a special laser micromachining process in this paper. The special process was developed to surmount the problems of using Nd:YAG laser to micro-machine transparent materials. This technology allows the rapid construction of complex 3-D channel paths inside the quartz cube without damaging the surface and neighboring area due to quartz's transparency at the Nd:YAG laser wavelength. The dimension of the micro channels can be controlled from 50 mum to 200 mum. Channels in different directions can be connected easily. The performance of the micro channels is carried out by resistance measurement. The behavior of laser micro-machining on quartz is also investigated.
All Author(s) ListQin SJ, Li WJ
Name of ConferenceIEEE-EMBS Asia-Pacific Conference on Biomedical Engineering
Start Date of Conference26/09/2000
End Date of Conference28/09/2000
Place of ConferenceHANGZHOU
Country/Region of ConferenceChina
Pages792 - 793
LanguagesEnglish-United Kingdom
Keywordslaser micro-machining; micro channel; quartz
Web of Science Subject CategoriesEngineering; Engineering, Biomedical; Engineering, Electrical & Electronic

Last updated on 2021-22-01 at 01:03