3-D micro channel system in a quartz cube for biomedical applications
Refereed conference paper presented and published in conference proceedings

香港中文大學研究人員
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摘要A novel technology is presented to create three dimensional (3-D) micro channel systems bounded by a solid 3-D quartz substrate by means of a special laser micromachining process in this paper. The special process was developed to surmount the problems of using Nd:YAG laser to micro-machine transparent materials. This technology allows the rapid construction of complex 3-D channel paths inside the quartz cube without damaging the surface and neighboring area due to quartz's transparency at the Nd:YAG laser wavelength. The dimension of the micro channels can be controlled from 50 mum to 200 mum. Channels in different directions can be connected easily. The performance of the micro channels is carried out by resistance measurement. The behavior of laser micro-machining on quartz is also investigated.
著者Qin SJ, Li WJ
會議名稱IEEE-EMBS Asia-Pacific Conference on Biomedical Engineering
會議開始日26.09.2000
會議完結日28.09.2000
會議地點HANGZHOU
會議國家/地區中國
出版年份2000
月份1
日期1
出版社WORLD PUBLISHING CORPORATION
頁次792 - 793
國際標準書號7-5062-4828-X
語言英式英語
關鍵詞laser micro-machining; micro channel; quartz
Web of Science 學科類別Engineering; Engineering, Biomedical; Engineering, Electrical & Electronic

上次更新時間 2020-27-11 於 01:54