Photoluminescence and electroluminescence properties of FeSi2-Si structures formed by MEVVA implantation
Refereed conference paper presented and published in conference proceedings


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AbstractWe have prepared FeSi2 precipitates of nanometer size in Si by ion implantation using a metal vapor vacuum arc (MEVVA) ion source and studied their photoluminescence properties. Broad photoluminescence (PL) spectra at around 1550 nm were observed for all samples attributed to emission from the FeSi2 precipitates. It was found that all the PL spectra can be decomposed into two peaks, a main peak at near 1530 nm and a satellite peak at 1607 nm. Samples with a furnace annealing (FA) step at a lower temperature of 850 degrees C are found to have a main peak position at a longer wavelength close to 1540 nm. For samples with a FA step at higher temperatures, the main peak position shifts to shorter wavelengths of near 1525 nm. In addition, we have also prepared MOS structures with implanted FeSi2 precipitates incorporated in the structures and measured their EL proper-ties. The EL proper-ties from these FeSi2-Si MOS structures after various thermal treatments were measured as a function of temperature from 80 to 300 K. Our preliminary results show that clear EL signals are obtained even at room temperature under appropriate processing conditions.
All Author(s) ListChow CF, Gao Y, Wong SP, Ke N, Li Q, Cheung WY, Shao G, Lourenco MA, Homewood KP
Name of ConferenceSymposium on Amorphous and Nanocrystalline Silicon Science and Technology held at the 2005 MRS Spring Meeting
Start Date of Conference28/03/2005
End Date of Conference01/04/2005
Place of ConferenceSan Francisco
Country/Region of ConferenceUnited States of America
Detailed description(Mat. Res. Soc. Symp. Proc. Vol. 862, Warrendale, PA 2005),
Year2005
Month1
Day1
Volume Number862
PublisherMATERIALS RESEARCH SOCIETY
Pages507 - 512
ISBN1-55899-815-2
ISSN0272-9172
LanguagesEnglish-United Kingdom
Web of Science Subject CategoriesCrystallography; Instruments & Instrumentation; Materials Science; Materials Science, Characterization & Testing; Materials Science, Multidisciplinary

Last updated on 2021-17-01 at 23:59