Internet-based remote assembly of micro-electro-mechanical systems (MEMS)
Publication in refereed journal

香港中文大學研究人員
作者已離職


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摘要This paper presents our development of a novel Internet-based E-manufacturing system to advance applications in micromanipulation and microassembly using an in situ polyvinylidene fluoride (PVDF) piezoelectric sensor. In this system, to allow close monitoring of magnitude and direction of microforces (adhesion, surface tension, friction, and assembly forces) acting on microdevices during assembly, the PVDF polymer films are used to fabricate the highly sensitive 1 D and 2D sensors, which can detect the real-time microforce and force rate information during assembly processes. This technology has been successfully used to perform a tele-assembly of the surface MEMS structures with force/visual feedback via Internet between USA and Hong Kong. Ultimately, this E-manufacture system will provide a critical and major step towards the development of automated micromanufacturing processes for batch assembly of microdevices.
著者Shen YT, Xi N, Lai KWC, Li WJ
期刊名稱Assembly Automation
出版年份2004
月份1
日期1
卷號24
期次3
出版社EMERALD GROUP PUBLISHING LTD
頁次289 - 296
國際標準期刊號0144-5154
電子國際標準期刊號1758-4078
語言英式英語
關鍵詞assembly; Internet; manufacturing systems; microsensors
Web of Science 學科類別Automation & Control Systems; AUTOMATION & CONTROL SYSTEMS; Engineering; Engineering, Manufacturing; ENGINEERING, MANUFACTURING

上次更新時間 2021-02-05 於 01:31