A combined etching process toward robust superhydrophobic SiC surfaces
Publication in refereed journal

香港中文大學研究人員

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替代計量分析
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其它資訊
摘要Large-scale porous SiC was fabricated by a combination of Pt-assisted etching and reactive ion etching. It was found that the surface roughness of combined etchings increased dramatically in comparison with metal-assisted etching or reactive ion etching only. To reduce the surface energy, the porous SiC surface was functionalized with perfluorooctyl trichlorosilane, resulting in a superhydrophobic SiC surface with a contact angle of 169.2 degrees and a hysteresis of 2.4 degrees. The superhydrophobicity of the SiC surface showed a good long-term stability in an 85 degrees C/85% humidity chamber. Such superhydrophobicity was also stable in acidic or basic solutions, and the pH values showed little or no effect on the SiC surface status. In addition, enhancement of porosity-induced photoluminescence intensity was found in the superhydrophobic SiC samples. The robust superhydrophobic SiC surfaces may have a great potential for microfluid device, thermal ground plane, and biosensor applications.
著者Liu Y, Lin W, Lin ZY, Xiu YH, Wong CP
期刊名稱Nanotechnology
出版年份2012
月份6
日期29
卷號23
期次25
出版社IOP Publishing: Hybrid Open Access
國際標準期刊號0957-4484
電子國際標準期刊號1361-6528
語言英式英語
Web of Science 學科類別Materials Science; Materials Science, Multidisciplinary; MATERIALS SCIENCE, MULTIDISCIPLINARY; Nanoscience & Nanotechnology; NANOSCIENCE & NANOTECHNOLOGY; Physics; Physics, Applied; PHYSICS, APPLIED; Science & Technology - Other Topics

上次更新時間 2020-17-11 於 23:36