Sub-wavelength Periodic Surface Structures Fabricated by Temporally Focused Femtosecond Laser
Refereed conference paper presented and published in conference proceedings


Full Text

Times Cited

Other information
AbstractIn this paper, we present a new sub-wavelength precision laser micro-machining method by combining laser-induced periodic surface structures (LIPSS) and temporal focusing. LIPSS is a well-established method for fabricating sub-wavelength structures by controlling the energy fluence (φ), polarization, and number of pulses (N) of a spatially focused femtosecond laser [1]. To enhance the axial fabrication resolution and arbitrarily control the processing area, we use a digital micromirror device (DMD), i.e., a programmable blazed grating, to spatially disperse the femtosecond laser pulses and induce temporal focusing at the focal plane [2]. This effectively confines the axial range that LIPSS can be formed. Mathematical models have been derived to guide the system design. Fabrication experiments are performed to verify the performance of the proposed fabrication method.
Acceptance Date01/08/2019
All Author(s) ListZhiqiang Fu, Nan Zhang, Shih-Chi Chen
Name of ConferenceAnnual Meeting of the American Society for Precision Engineering
Start Date of Conference28/10/2019
End Date of Conference01/11/2019
Place of ConferencePittsburg, PA
Country/Region of ConferenceUnited States of America
Proceedings TitleProceedings of the 34th ASPE Annual Meeting
Year2019
Month10
PublisherASPE
Place of PublicationUSA
Pages403 - 406
ISBN978-188770678-0
LanguagesEnglish-United States
KeywordsLIPSS, nanofabrication

Last updated on 2020-02-09 at 01:39