Design of a Six-axis Parallel Nanopositioner Using Decoupled Flexural Legs
Refereed conference paper presented and published in conference proceedings


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AbstractIn this paper, we present the design of a compliant six-axis parallel nanopositioner. The mechanism is designed based on a new method of decoupled flexural legs. The nanopositioner is actuated by six linear actuators, located below flexure mechanism on the same plane, achieving a compact device envelope. Static and dynamic positioning experiments have been devised and performed to characterize the range, resolution, and speed characteristics of the nanopositioner.
Acceptance Date01/08/2019
All Author(s) ListXiangbo Liu, Chenglin Li, Shih-Chi Chen
Name of ConferenceAnnual Meeting of the American Society for Precision Engineering
Start Date of Conference28/10/2019
End Date of Conference01/11/2019
Place of ConferencePittsburg, PA
Country/Region of ConferenceUnited States of America
Proceedings TitleProceedings of the 34th ASPE Annual Meeting
Year2019
Month10
PublisherASPE
Place of PublicationUSA
Pages422 - 426
ISBN978-188770678-0
LanguagesEnglish-United States
Keywordssix-axis positioner, compliant mechanism

Last updated on 2020-02-09 at 01:39